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Journal of Physical and Chemical Reference Data / Volume 27 / Issue 5

J. Phys. Chem. Ref. Data 27, 889 (1998); http://dx.doi.org/10.1063/1.556024 (25 pages)

Electron Interactions With C3F8

L. G. Christophorou and J. K. Olthoff

Electricity Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-0001

(Received 17 Mar 1998)

To aid the many and diverse applications for which perfluoropropane (C3F8) is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for the C3F8 molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior of C3F8 in practical uses, especially plasma processing. © 1998 American Institute of Physics and American Chemical Society.

© 1998 American Institute of Physics and American Chemical Society

KEYWORDS and PACS

Keywords

collections of physical data, organic compounds, molecule-electron collisions, electron impact excitation, electron impact ionisation, electron impact dissociation, electron attachment, C3F8, cross sections, electron attachment, electron collisions, electron transport, perfluoropropane, scattering

PACS

  • 01.30.Kj

    Handbooks, dictionaries, tables, and data compilations

  • 34.80.-i

    Electron and positron scattering

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.556024

PUBLICATION DATA

ISSN

0047-2689 (print)  
1529-7845 (online)

Publisher

$abstract.society.value is a Member of CrossRef NIST

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